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Small vacuum deposition equipment Product List

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Experimental small vacuum deposition device

Equipped with MAX10V-150A power and a large-capacity LN2 trap, it enables rapid sample preparation. Its compact size makes it space-saving and reasonably priced.

Container dimensions: φ150×200H, exhaust system: 2-inch diffusion pump (with LN2) + rotary pump 20L/min. A 2-inch size is used for the main valve to effectively utilize the pump's exhaust capacity. The metal parts of the vacuum container, main valve, three-way valve, and leak valve are made of stainless steel.

  • Company:ヤシマ
  • Price:1 million yen-5 million yen
  • Other surface treatment equipment
  • Small vacuum deposition equipment

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Small Vacuum Vapor Deposition Device "HVE-100" [Achieving Clean Film Formation!]

A compact vacuum deposition device capable of clean film formation! It is equipped with a shutter, allowing for stable deposition!

The "HVE-100" is a compact vacuum deposition device that saves space. The substrate deposition surface is installed facing downward, and the arrangement allows for deposition upwards through evaporation from a resistance heating source (deposition up). It is equipped with a shutter, enabling stable deposition. 【Features】 ■ High vacuum exhaust system: Achieves a vacuum level of <10^-4Pa for clean film formation ■ The chamber is made of SUS for easy maintenance and has internal anti-deposition plates ■ Space-saving/compact: Desktop model with dimensions of W500×D395mm ■ Compatible with your existing exhaust system and film thickness measurement devices *For more details, please refer to the PDF document or feel free to contact us.

  • Vacuum Equipment
  • Evaporation Equipment
  • Small vacuum deposition equipment

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